Micro/Nano Patterning using Nanoimprinting Lithography
نویسندگان
چکیده
منابع مشابه
Investigation of Antiadhesive Coatings for Nanoimprinting Lithography
This article presents an investigation of antiadhesive coatings for nanoimprinting lithography. To get the optimum parameters of the coating process, a surface-contact angle goniometer and an atomic force microscope were used for detailed comparison of the coated surfaces produced with different process parameters. With the antiadhesive coating, the contact angle of deionized water on the mold ...
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ژورنال
عنوان ژورنال: Seikei-Kakou
سال: 2013
ISSN: 0915-4027,1883-7417
DOI: 10.4325/seikeikakou.25.161